Investigation of the Dependence of Thickness and Roughness of TiO2 Thin Films Fabricated Using Pulsed Laser Deposition on the Laser Energy
American Journal of Polymer Science and Technology
Volume 5, Issue 2, June 2019, Pages: 35-39
Received: Mar. 2, 2019; Accepted: Apr. 8, 2019; Published: May 15, 2019
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Ahmed Mohamed Salih, Department of Laser System, Institute of Laser, Sudan University of Science and Technology, Khartoum, Sudan
Nafie Abdallatief Almuslet, Department of Physics, Almogran College of Science and Technology, Khartoum, Sudan
Abdelmoneim Mohamed Awadelgied, Department of General Science, Karary University, Omdurman, Sudan
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In this work Titanium Dioxide thin films were successfully deposited on glass substrates at room temperature by pulsed laser deposition technique (PLD) using a Q-switch Nd: YAG laser to fabricate thin films. The target was an Anatase TiO2 powder that converted to solid disks by compressing it. The disks were irradiated with different laser pulse energies (100, 150 and 200 mJ) with the same number of laser pulses (10 pulses) and the same laser repetition rate to fabricate three groups of thin film (I, II and III). An atomic force microscopy (AFM) was used for the characterization of the thickness and topography of these thin films. The results showed that the thickness of the films was in the range of hundreds nanometers and it is increased exponentially with the laser energy. The dependence of the root means squire roughness (RMS) on laser pulse energy also was investigated and the results showed that the (RMS) increase exponentially as laser pulse energy to specific value, and then decrease exponentially that the whole curve looks like Gaussian shape.
TiO2 Thin Films, Pulsed Laser Deposition, Nano-Films, Roughness, AFM
To cite this article
Ahmed Mohamed Salih, Nafie Abdallatief Almuslet, Abdelmoneim Mohamed Awadelgied, Investigation of the Dependence of Thickness and Roughness of TiO2 Thin Films Fabricated Using Pulsed Laser Deposition on the Laser Energy, American Journal of Polymer Science and Technology. Vol. 5, No. 2, 2019, pp. 35-39. doi: 10.11648/j.ajpst.20190502.11
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Fujishima, A., Raro, T. N. & Tryk, D. A. "Titanium dioxide photocatalysis". J. Photochem. Photobiol. C 1, 1–21 (2000).
Shi, E. et al. "TiO2-coated carbon nanotube-silicon solar cells with efficiency of 15%". Sci. Rep. (2012) 2, 884.
Thompson, T. L.; Yates, J. T., Jr. Chem. Rev. (2006), 106, 4428.
Chen, X.; Mao, S. S. Chem. Rev. (2007), 107, 2891.
Chen, H.; Nanayakkara, C. E.; Grassian, V. H. Chem. Rev. (2012), 112, 5919.
Zhang, Z.; Yates, J. T., Jr. Chem. Rev. (2012), 112, 5520.
Henderson, M. A.; Lyubinetsky, I. Chem. Rev. (2013), 113, 4428.
Pang, C. L.; Lindsay, R.; Thornton, G. Chem. Rev. (2013), 113, 3887.
Weast RC, ed. Handbook of Chemistry and Physics, 66th Ed, Cleveland, OH, CRC Press, (1985) pp. B-154–B-155.
Pelaez M., Nolan N. T., Pillai S. C., Seery M. K., Falaras P., Kontos A. G., Dunlop P. S. M., Hamilton J. W. J., Byrne J. A., O’Shea K., Entezari M. H., Dionysiou D. D., Appl. Catal. B Environ. 125 (2012) 331.
Yongfeng Ju, Mahua Wang, Yunlong Wang, Shihu Wang, and Chengfang Fu, "Electrical Properties of Amorphous Titanium Oxide Thin Films for Bolometric Application", Advances in Condensed Matter Physics, 2013, (2013).
Joy Tan, Wojtek Wlodarski and Kourosh Kalantar-Zadeh, 2006, "Carbon Monoxide Gas Sensor Based on Titanium Dioxide Nanocrystalline with a Langasite Substrate", IEEE Sensors (2006), EXCO, Daegu, Korea.
Braun JH (1997). "Titanium dioxide"—A review. J Coatings Technol, 69:59–72. Chang LY (2002). Industrial Minerals: Materials, Processes and Uses, Upper Saddle River, NJ, Prentice Hall.
Bumjoon, K., B. Dongjin, et al. "Structural Analysis on Photocatalytic Efficiency of TiO2 by Chemical Vapor Deposition." Jpn. J. Appl. Phys. (2002) 41.
El-Maghraby E. M., Nakamura Y., Rengakuji S., Catalysis Communications 9 (2008) 2357-2360.
Wang Y. L., Zhang K. Y., Surf. Coat. Technol. 140 (2001) 155.
E. Gyorgy, G. Socol, E. Axente, I. N. Mihailescu, C. Ducu, S. Ciuca, Applied SurfaceScience 247 (2005) 429-433.
L. Yan, Y. D. Yang, Z. G. Wang, Z. P. Xing, J. F. Li, and D. Viehland, “Review of magnetoelectric perovskite-spinel self-assembled nano composite thin films,” Journal of Materials Science, vol. 44, no. 19, pp. 5080–5094, (2009)., 2a J. Wang, J.
C.-W. Nan, M. I. Bichurin, S. Dong, D. Viehland, and G. Srinivasan, “Multiferroic magnetoelectric composites: historical perspective, status, and future directions,” Journal of Applied Physics, vol. 103, no. 3, Article ID 031101, 35 pages, (2008).
Ohring M. Materials Science of Thin Films. 2nd ed (2001).
Shaozhu Xiao, et al. "Resputtering effect during MgO buffer layer deposition by magnetron sputtering for superconducting coated conductors" Journal of Vacuum Science & Technology A 33, 041504 (2015).
Geohegan, D. B., "Diagnostics and characteristics of laser-produced plasmas", in Pulsed Laser Deposition of Thin Films, D. B., Chrisey and G. K. Hubler, editors, John Wiley & Sons, Inc., New York, 115-165 (1994).
Chen, KR., LN. Leboeuf, R. F. Wood, D. B. Geohegan, J. M. Donato, C. L. Liu, and A. A. Puretzky, "Laser-solid interaction and dynamics of laser-ablated materials", Appl. Surf. Sci. 96-98, 45-49 (1996).
Edgar Alfonso, et al. "Thin Film Growth Through Sputtering Technique and Its Applications" Crystallization – Science and Technology Chapter DOI: 10.5772/35844 September (2012).
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