Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery
International Journal of Biomedical Science and Engineering
Volume 6, Issue 1, March 2018, Pages: 1-6
Received: Nov. 29, 2017;
Accepted: Jan. 15, 2018;
Published: Feb. 1, 2018
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Benjamin Arnold, Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany
Daniel Wohlrab, Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany
Christoph Meinecke, Center for Microtechnologies, University of Technology Chemnitz, Chemnitz, Germany
Danny Reuter, Center for Microtechnologies, University of Technology Chemnitz, Chemnitz, Germany
Jan Mehner, Department of Microsystems and Biomedical Engineering, Faculty of Electrical Engineering and Information Technology, University of Technology Chemnitz, Chemnitz, Germany
Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems (MEMS) facilitates the placing of orientation detection sensors close to the mounting of the surgical instrument to enhance positioning accuracy. A high resolution inclination sensor was developed using the innovative approach of laser-micro-welding. Trench sizes down to 800 nm are fabricated with more than 6-fold increase in aspect ratios (structure depth to electrode gap) compared to sensors without gap reduction. Electrical and physical tests as well as finite-element-simulations were performed. An increased sensitivity from 7.2 fF/° up to 60 fF/° was verified for the sensor with reduced electrode gap and a customized ASIC.
Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery, International Journal of Biomedical Science and Engineering.
Vol. 6, No. 1,
2018, pp. 1-6.
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