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Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope
Optics
Volume 4, Issue 3-1, June 2015, Pages: 43-49
Received: Mar. 31, 2015; Accepted: Mar. 31, 2015; Published: Mar. 14, 2016
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Authors
Qinghua Wang, Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
Shien Ri, Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
Hiroshi Tsuda, Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
Takashi Tokizaki, Research Institute for Measurement and Analytical Instrumentation, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan
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Abstract
A full-field deformation measurement method using moiré fringes generated at high scanning speed under a laser scanning microscope (LSM) was proposed. The formation principle and the deformation measurement principle were presented. Simulation and experiment verifications were performed to show the effectiveness and the accuracy of the proposed fast scanning moiré method, where the scanning line spacing is an integral multiple of the basic scanning line spacing. The moiré spacing, and the deformation measurement sensitivity and accuracy are almost the same as in the traditional LSM scanning moiré method. The fast scanning process allows a high scanning speed and a large view field without reducing the deformation measurement sensitivity. The higher measurement speed makes this method more suitable to be combined with the phase-shifting technique than the traditional LSM scanning moiré method. Besides, the application scope of the LSM moiré method in the field of deformation measurement is extended because more specimen gratings can be used to generate moiré fringes.
Keywords
Deformation Measurement, Strain, High Speed, Fast Scanning Moiré Method, Microscope, Grating
To cite this article
Qinghua Wang, Shien Ri, Hiroshi Tsuda, Takashi Tokizaki, Deformation Measurement Method Using Moiré Fringes at High Scanning Speed Under a Laser Scanning Microscope, Optics. Special Issue: Optical Techniques for Deformation, Structure and Shape Evaluation. Vol. 4, No. 3-1, 2015, pp. 43-49. doi: 10.11648/j.optics.s.2015040301.20
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