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Fabrication of Micro-grating Structure by Nanosecond Laser
Volume 4, Issue 3-1, June 2015, Pages: 5-8
Received: Feb. 23, 2015; Accepted: Mar. 30, 2015; Published: May 12, 2015
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Yanlong Huang, Faculty of Civil Engineering and Mechanics, Jiangsu University, Zhenjiang, China
Jianguo Zhu, Faculty of Civil Engineering and Mechanics, Jiangsu University, Zhenjiang, China
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The fabrication method by nanosecond laser technology for micro-grating is investigated in this paper. A nanosecond laser system is established and the mechanism of laser processing on material surface is theoretically analyzed. The damage threshold of stainless steel is obtained experimentally when the nanosecond laser irradiates on the specimen’s surface and the influence of the laser pulse energy to the fabricated micro-gratings are also studied. In the end, micro-gratings with high-quality are provided to validate the feasibility of the fabrication method by nanosecond laser technology.
Grating, Nanosecond Laser, Photomechanics
To cite this article
Yanlong Huang, Jianguo Zhu, Fabrication of Micro-grating Structure by Nanosecond Laser, Optics. Special Issue: Optical Techniques for Deformation, Structure and Shape Evaluation. Vol. 4, No. 3-1, 2015, pp. 5-8. doi: 10.11648/j.optics.s.2015040301.12
B.Han, “Higher sensitivity moiré interferometry for micromechanics Studies,” Optical Engineering vol. 31, pp.1517-1526, 1992.
J.L.Rouviere, E.Sarigiannidou. Theoretical discussions on the geometrical phase analysis. Ultramicroscopy 106(2005)1–17.
Xie Huimin, Shang Haixia, Dai Fulong, et al. “Phase shifting SEM moiré method,” Optics and Laser Technology, vol.36(4), pp.291-297, 2004.
Moulart R, Rotinat R, Pierron F, et al. “On the realization of microscopic grids for local strain measurement by direct interferometric photolithography,”Optics and lasers in engineering, vol.45(12), pp.1131-1147, 2007.
Tang M, Xie Huimin, Li Y, et al. “A New Grating Fabrication Technique on Metal Films Using UV-Nanoimprint Lithography,” Chinese Physics Letters, vol.29(9), pp.098101,2012.
Kishimoto S, Tanaka Y, Yin F, et al. “Strain distribution measurement in laminated martensitic/austenitic steel during a compressive test by the electron moire method,” Journal of Strain Analysis for Engineering Design, 2011.
Du Hua, Xie Huimin, Guo Zhiqiang, et al. “Development of the Technique for Fabricating Submicron MoiréGratings on Metal Materials Using Focused Ion Beam Milling,” Chinese Physics Letters, vol.24,pp.2521-2524, 2007.
Yung-Chun Lee, Chun-Ming Chen, Chun-Ying Wu. “A new excimer laser micromachining method for axially symmetric 3D micro-structures with continuous surface profiles,” Sensors and Actuators A. vol.117,pp.349–355, 2005.
Felter T E, Hrubesh L, Kubota A, et al. “Laser damage probability studies of fused silica modified by MeV ion implantation,” Nuclear Instruments and Methods in Physics Research B, vol. 27,pp.72-79, 2003.
J.M.Liu. “Simpletechnique for measurements of pulsed Gaussian-beam spot sizes,” Opt. Lett., vol.7(5), pp.196~198, 1982.
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